Recent salaries shared by Senior Software Engineer at ASML
Job Title | Years of Experience
Total Pay
Base • Additional pay
Location
Date submitted
Job Title | Years of Experience
Location
Date submitted
Total Pay
Base • Additional pay
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ASML pay FAQs
- The average salary for Senior Software Engineer is $149,911 per year (estimate) in US, which is 111% higher than the average ASML salary of €71,000 per year (estimate) for this job.
- ASML employees working as Senior Software Engineer in US have attributed a compensation and benefits rating of 2.3 out of 5 stars, based on 34 ratings. This is 32% lower than the average of Senior Software Engineer professionals at ASML worldwide.
- The salary trajectory of a Senior Software Engineer ranges between locations and employers. The salary starts at €0 per year (estimate) and goes up to €0 per year (estimate) for the highest level of seniority.
- The estimated average salary for a Senior Software Engineer at ASML is €207,812 per year or €100 per hour, but some professionals have reported earning up to roughly €323,427 per year (90th percentile). The typical pay range is between €166,670 (25th percentile) and €263,409 (75th percentile) annually. This is based on 71 salaries submitted by ASML Senior Software Engineer professionals on Glassdoor, as of Jun 2026.
