ASML employees working as Systems Performance Engineer in US have attributed a compensation and benefits rating of 2 out of 5 stars, based on 1 ratings. This is 46% lower than the average of Systems Performance Engineer professionals at ASML worldwide.
The salary trajectory of a Systems Performance Engineer ranges between locations and employers. The salary starts at €0 per year (estimate) and goes up to €0 per year (estimate) for the highest level of seniority.
The estimated average salary for a Systems Performance Engineer at ASML is €166,400 per year or €80 per hour, but some professionals have reported earning up to roughly €239,748 per year (90th percentile). The typical pay range is between €139,054 (25th percentile) and €202,124 (75th percentile) annually. This is based on 35 salaries submitted by ASML Systems Performance Engineer professionals on Glassdoor, as of Jun 2026.