ASML employees working as Technical Support Engineer in US have attributed a compensation and benefits rating of 4 out of 5 stars, based on 7 ratings. This is 9% lower than the average of Technical Support Engineer professionals at ASML worldwide.
The salary trajectory of a Technical Support Engineer ranges between locations and employers. The salary starts at €54,705 per year (estimate) and goes up to €61,500 per year (estimate) for the highest level of seniority.
The estimated average salary for a Technical Support Engineer at ASML is €107,198 per year or €52 per hour, but some professionals have reported earning up to roughly €170,628 per year (90th percentile). The typical pay range is between €84,495 (25th percentile) and €137,320 (75th percentile) annually. This is based on 29 salaries submitted by ASML Technical Support Engineer professionals on Glassdoor, as of Jun 2026.