Recent salaries shared by System Performance Engineer at ASML
Job Title | Years of Experience
Total Pay
Base • Additional pay
Location
Date submitted
Job Title | Years of Experience
Location
Date submitted
Total Pay
Base • Additional pay
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ASML pay FAQs
- The average salary for System Performance Engineer is $110,685 per year (estimate) in US, which is 141% higher than the average ASML salary of €46,000 per year (estimate) for this job.
- ASML employees working as System Performance Engineer in US have attributed a compensation and benefits rating of 2 out of 5 stars, based on 1 ratings. This is 46% lower than the average of System Performance Engineer professionals at ASML worldwide.
- The salary trajectory of a System Performance Engineer ranges between locations and employers. The salary starts at €0 per year (estimate) and goes up to €0 per year (estimate) for the highest level of seniority.
- The estimated average salary for a System Performance Engineer at ASML is €132,742 per year or €64 per hour, but some professionals have reported earning up to roughly €203,971 per year (90th percentile). The typical pay range is between €106,645 (25th percentile) and €166,851 (75th percentile) annually. This is based on 35 salaries submitted by ASML System Performance Engineer professionals on Glassdoor, as of Jun 2026.